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IGS ALD Valve
VCA100 series

カテゴリー

  • UHP | Valves | ALD Valves
  • Dimensions
  • Ordering Information
  • Specification

Dimensions

 

TypePart NumberABCDH
IGSVCA100-11W28.6Ø4.4 Through holes
2Port : 4ea / 3Port : 6ea 
Ø28.41081.5 mm
(Normal Type)
106.9 mm
(High Temp. Type)
VCA100-11C28.6Ø4.4 Through holes
2/3Port : 4ea 
Ø28.47.75
VCA200-15W38.2Ø5.6 Through holes
2Port : 4ea / 3Prot : 6ea
Ø28.41377 mm
(Normal Type)
102.6 mm
(High Temp. Type)
VCA200-15C38.2Ø5.6 Through holes
2/3Port : 4ea 
Ø28.411.6


Ordering Information

Part NumberConnection OptionMax Temp.
Option
Sensor OptionOperation Type
SizeTypePort
VCA10011 : 1.125“
04 : 1/4“
W : W-Seal
C : C-Seal
M : UCR Male
F : UCR Female
2 : 2 Port
3 : 3 Port
1 : 120°C
2 : 200°C
1 : N/A
2 : Actuator Sensor
1 : Pneumatic N.C
2 : Pneumatic N.O
VCA20015 : 1.5“
08 : 1/2“
W : W-Seal
C : C-Seal
M : UCR Male
F : UCR Female
2 : 2 Port
3 : 3 Port
1 : 120°C
2 : 200°C
1 : N/A
2 : Actuator Sensor
1 : Pneumatic N.C
2 : Pneumatic N.O

Specification

ModelVCA100 SeriesVCA200 Series
Cv Value0.270.62
Working PressureVacuum to 145 psigVacuum to 145 psig
Max. Working TempNormal Type : 0~120°C(32~248°F)
High Temp. Type : 0~200°C(32~392°F)
Normal Type : 0~120°C(32~248°F)
High Temp. Type : 0~200°C(32~392°F)
Inboard leakage
Allowance-He
 1x10-9 atm.cc/s 1x10-9 atm.cc/s
Internal leakage
Allowance-He
 1x10-9 atm.cc/s 1x10-9 atm.cc/s
MaterialsBody316L VAR SS316L VAR SS
ActuatorALUMINUMALUMINUM
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