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IGS ALD Valve
VCA100 series
カテゴリー
- UHP | Valves | ALD Valves
- Dimensions
- Ordering Information
- Specification
Dimensions
| Type | Part Number | A | B | C | D | H | |
| IGS | VCA100-11W | 28.6 | Ø4.4 Through holes 2Port : 4ea / 3Port : 6ea | Ø28.4 | 10 | 81.5 mm (Normal Type) 106.9 mm (High Temp. Type) | |
| VCA100-11C | 28.6 | Ø4.4 Through holes 2/3Port : 4ea | Ø28.4 | 7.75 | |||
| VCA200-15W | 38.2 | Ø5.6 Through holes 2Port : 4ea / 3Prot : 6ea | Ø28.4 | 13 | 77 mm (Normal Type) 102.6 mm (High Temp. Type) | ||
| VCA200-15C | 38.2 | Ø5.6 Through holes 2/3Port : 4ea | Ø28.4 | 11.6 | |||
Ordering Information
| Part Number | Connection Option | Max Temp. Option | Sensor Option | Operation Type | ||
| Size | Type | Port | ||||
| VCA100 | 11 : 1.125“ 04 : 1/4“ | W : W-Seal C : C-Seal M : UCR Male F : UCR Female | 2 : 2 Port 3 : 3 Port | 1 : 120°C 2 : 200°C | 1 : N/A 2 : Actuator Sensor | 1 : Pneumatic N.C 2 : Pneumatic N.O |
| VCA200 | 15 : 1.5“ 08 : 1/2“ | W : W-Seal C : C-Seal M : UCR Male F : UCR Female | 2 : 2 Port 3 : 3 Port | 1 : 120°C 2 : 200°C | 1 : N/A 2 : Actuator Sensor | 1 : Pneumatic N.C 2 : Pneumatic N.O |
Specification
| Model | VCA100 Series | VCA200 Series | |||
| Cv Value | 0.27 | 0.62 | |||
| Working Pressure | Vacuum to 145 psig | Vacuum to 145 psig | |||
| Max. Working Temp | Normal Type : 0~120°C(32~248°F) High Temp. Type : 0~200°C(32~392°F) | Normal Type : 0~120°C(32~248°F) High Temp. Type : 0~200°C(32~392°F) | |||
| Inboard leakage Allowance-He | ≤ 1x10-9 atm.cc/s | ≤ 1x10-9 atm.cc/s | |||
| Internal leakage Allowance-He | ≤ 1x10-9 atm.cc/s | ≤ 1x10-9 atm.cc/s | |||
| Materials | Body | 316L VAR SS | 316L VAR SS | ||
| Actuator | ALUMINUM | ALUMINUM | |||
이전
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