前のページに戻ります
VCBL series - 1/4”~1/2”
Standard Type Low Pressure Bellows Valve - Pneumatic Actuating Operation

カテゴリー

  • UHP | Valves | Bellows Valves
  • Dimensions
  • How To Order
  • Specification
  • Features

Dimensions

Part No.End ConnectionDimensions (mm)
InletOutletLhHW(Ø)FEK
VCBLU-04T-1/4" UNILOK64.213.899.637.825.023.0M5
U-06T-3/8" UNILOK77.6
U-08T-1/2" UNILOK83.0
C-04M-1/4" Male UCR58.0
C-08M-1/2" Male UCR63.0
C-04F-1/4" Female UCR70.6
C-08F-1/2" Female UCR90.0
WB-04T-1/4" Tube Butt Weld150.0
WB-06T-3/8" Tube Butt Weld150.0
WB-08T-1/2" Tube Butt Weld150.0

 

How To Order

UNILOK VCB series valves are ordered by part number as shown below.

Example : The following part number, VCBLU-08T SL-BA is designated for Low Pressure Bellows 

Valve, both 1/2” UNILOK Tube Fittings, 316LSS, BA.


VCBLU-08T--SL-BA
UNILOK
Clean Valves
Valve
Type
Connection
Type
Connection
Size
Operation
Type
MaterialSurface
Finish Level
Valve TypeConnection SizeOperation Type
BLStandard Low PressureFractional(Inch) Tube O.D. DesignationNoneManual Indicator Handle
BFForged BodyTube
O.D.
inch1/43/81/23/41POPneumatic - Normal Open
mm6.359.5212.7019.0525.40PCPneumatic - Normal Close
Connection TypeDesignator04T06T08T12T16T
UUNILOK Tube FittingMaterials
C-*MMale UCRPipe Size Designation (NPT or ISO7/1-PT)DM316LSS-SEMI F20
C-*FFemale UCRPipe Size15A20A25ASL316LSS
WB-Butt Weld -TubeDesignator15A20A25A
WB-*PButt Weld - PipeSurface Finish Level
FLFlangedUCR (Metal Face Seal) Size DesignatorBABA - Bright Annealing
Pipe Size1/41/23/4EPEP - Electro Polished
Designator040812


Specification

Size1/4"3/8", 1/2"
Orifice Size4.38.0
Cv Value0.30.7
Max. Working Pressure10 bar (145 psig)
Max. Working Temperature-10~80 (14~176)
Internal Leakage
Allowance - He (Holding Time - Min 30 sec)
4~7 bar (58~101 psig)
External Leakage
Allowance - He (Holding Time - Min 1 min)
4x10-9 atm.cc/s

Features


The body is compactly designed with minimal dead space. The body material complies with SEMI F-20, "Specification for 316LSS Materials for UHP (Ultra High Purity) Grade Semiconductor Manufacturing Applications."

The valve features low actuation torque and minimal particle generation. It offers minimal contributions of moisture, oxygen, and hydrocarbons due to UNILOK's special cleaning process in a certified clean room. The wetted areas have an excellent finish level thanks to UNILOK's electro-polishing process. The 316LSS precision-formed and electro-polished bellows are designed for a long cycle life. The PCTFE stem tip material provides remarkable chemical and thermal resistance. Both panel and bottom mounting options are available.


Helium Leak Test

Every valve in the VCB series is inboard helium leak tested to a rate of 4x10^-9 atm.cc/s at the seat and all seals.


Particle Contribution Test

Performed in accordance with ASTM F1394-92.


Moisture Contribution Test

Conducted according to SEMI 90120397B-STD.


Assembling

In compliance with SEMI E49.6.


Cleaning

All components are precisely cleaned with 18 MΩ deionized water following the passivation procedure, in accordance with our own UHP cleaning process. Reference specification: SEMI E49.6.


Packaging

Each component is double-bagged to ensure cleanliness and protect against environmental contamination. Referenced specification: SEMI E49.1.


Important Notification

The proper installation, material compatibility, operation, and maintenance of these valves are the responsibility of the user. The total system design must be considered to ensure optimal performance and safety.

The overall process of testing, cleaning, assembling, and packaging for every valve in the VCB series is performed in a certified clean room.

 

닫기
top
로그인하셔야 본 서비스를 이용하실 수 있습니다.