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VCD3F series
Standard Type Low Pressure Diaphragm Valve - Pneumatic Actuating Operation
カテゴリー
- UHP | Valves | Diaphragm Valves
- Dimensions
- How To Order
- Specification
- Features
Dimensions
| Part No. | Dimensions (mm) | |||||||||
| L | G | BG | BH | H | h | E | F | K | ||
| VCD3F Series | 70.6 | 35.3 | 24.2 | 108 | 83.5 | 11.1 | 25.4 | 26 | M5 | |
How To Order
| VCD3FL | C | - | 3D | - | 04 | MR | F | MR | - | PC | R | - | SL | - | EP | |
| Max Preesure | Connection Type1 | Flow Type | Outlet Connection Size | Connection Type2 | Operation Type | Stikcer Color | Body Material | Surface Finish Level | ||||||||
| Valve Type | Connection Type1 | Body Material | |||||||||||
| VCD3FL | Valve
Series (Low Pressure:10bar) | U | Tube Fitting | DM | 316LSS-SEMI F20 | ||||||||
| C | UCR | SL | 316LSS | ||||||||||
| VCD3FH | Valve Valve
Series (High Pressure:206bar) | ||||||||||||
| Connection Size | Connection Type2 | ||||||||||||
| * In other cases of pressure, a number is displayed. ex)17bar=17 | 04 | 1/4” / 6.35mm | MR | Swivel Male UCR | |||||||||
| F | Female UCR | ||||||||||||
| Surface Finish Level | Operation Type | WB | Tube Butt Weld | ||||||||||
| BA | BA | None | Manual Handle | * Record
only once if all connections are the same. | |||||||||
| EP | EP – Electro Polished | PC | Pneumatic Normal Close | ||||||||||
| PO | Pneumatic Normal Open | ||||||||||||
| LH | Lever Manual Handle | ||||||||||||
*
For 2 Ports cases, if straight, no notation is required
Specification
| Item | VCD3FL | VCD3FH | VCD3F17 |
| Size | 1/4" | ||
| Orifice Size | Ø4.3mm | ||
| CV Value | 0.3 | ||
| Max Working Pressure | 10bar | 206bar | 17bar |
| Max. Working Temperature | -10~80°C (14~176°F) | ||
| Operation working Pressure | 4~7bar | 5~7bar | 5~7bar |
| Internal leakage Allowance-He | ≤1x10-9 atm.cc/s | ||
| External leakage Allowance-He | ≤1x10-9 atm.cc/s | ||
Features
A compactly designed body with minimal dead space.
Body materials comply with SEMI F-20, “Specification for 316LSS Materials for UHP (Ultra High Purity) Grade Semiconductor Manufacturing Applications”
Maximum flow capacity
Minimal particle generation
Minimal contributions of moisture, oxygen and hydrocarbon with UNILOK’s own special cleaning process in a certified clean room
Excellent finish level of wetted areas with UNILOK’s own electro polish process
Elgiloy® diaphragm material with strong durability as well as corrosion resistance for long cycle life
PCTFE seat material with remarkable chemical and thermal resistance
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