The body is compactly designed with minimal dead space. The body material complies with SEMI F-20, "Specification for 316LSS Materials for UHP (Ultra High Purity) Grade Semiconductor Manufacturing Applications."

The valve features low actuation torque and minimal particle generation. It offers minimal contributions of moisture, oxygen, and hydrocarbons due to UNILOK's special cleaning process in a certified clean room. The wetted areas have an excellent finish level thanks to UNILOK's electro-polishing process. The 316LSS precision-formed and electro-polished bellows are designed for a long cycle life. The PCTFE stem tip material provides remarkable chemical and thermal resistance. Both panel and bottom mounting options are available.

Helium Leak Test

Every valve in the VCB series is inboard helium leak tested to a rate of 4x10^^​-9 atm.cc/s at the seat and all seals.

Particle Contribution Test

Performed in accordance with ASTM F1394-92.

Moisture Contribution Test

Conducted according to SEMI 90120397B-STD.

Assembling

In compliance with SEMI E49.6.

Cleaning

All components are precisely cleaned with 18 MΩ deionized water following the passivation procedure, in accordance with our own UHP cleaning process. Reference specification: SEMI E49.6.

Packaging

Each component is double-bagged to ensure cleanliness and protect against environmental contamination. Referenced specification: SEMI E49.1.

Important Notification

The proper installation, material compatibility, operation, and maintenance of these valves are the responsibility of the user. The total system design must be considered to ensure optimal performance and safety.

The overall process of testing, cleaning, assembling, and packaging for every valve in the VCB series is performed in a certified clean room.