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CGA series
CGA Assembly

カテゴリー

  • UHP | Fittings | Cylinder Connectors | CGA Assembly
  • Dimensions
  • How to order
  • Gases Assignment Table
  • Features

Dimensions

▶Glands (Type A, Type B, Type C ) 


 

Type AType BType C
Part No.Dimension (mm)Part No.Dimension (mm)Part No.Dimension (mm)
ELEFABCDABCD
BUGL-06S65.310.004.356.35BUGL-01S52.510.004.356.35BUGL-04S66.210.004.356.35
BUGL-08S65.3BUGL-02S55.5BUGL-05S66.8
BUGL-03S58.0BUGL-09S66.7
BUGL-07S66.1
BUGL-10S66.7
BUGL-11S55.5
                    

▶Bearings                                                                                                ▶Gaskets                                                                             



 

Part No.Dimension (mm)Part No.Dimension (mm)Part No.Dimension (mm)
ABCABCABC
EBR-0112.818.55.7CGT-01A6.616.83.0CGT-01B7.515.41.6
EBR-0212.823.59.0CGT-02A10.317.3CGT-05B8.013.5
CGT-03A9.721.5PTFE instead of PCTFE is available upon request.
To order, add - TF to the end of part number.
Example : CGT-02A-TF

                                     
▶Female nuts                                                                                              ▶Male nuts

 

Part No.Dimension (mm)ThreadPart No.Dimension (mm)Thread
AB (Hex)AB (Hex)
EFN-0830L35.0030.160.830-14NGO-LH-INTEMN-0803R29.0023.810.803-14UNS-2A-RH-EXT
EFN-0830R35.0030.160.830-14NGO-RH-INTEMN-0880L29.0023.810.880-14NGO-LH-EXT
EFN-0908R35.0030.160.908-14NGO-RH-INTEMN-0960L29.0026.980.960-14NGO-LH-EXT
EFN-1035L36.0031.751.035-14NGO-LH-INTEMN-0960R29.0026.980.960-14NGO-RH-EXT
EFN-1035R36.0031.751.035-14NGO-RH-INT
EFN-JS21L35.0030.16JIS21-14-OL
EFN-JS21R35.0030.16JIS21-14-OR
EFN-JS22L35.0030.16JIS22-14-OL
EFN-JS22R35.0030.16JIS22-14-OR
EFN-JS23R35.0030.16JIS23-14-OR
EFN-JS26L36.0031.75JIS26-14-OL
EFN-JS26R36.0031.75JIS26-14-OR
                                       



 

                                   

▶Female plugs                                                                                              ▶Male plugs

Part No.Dimension (mm)ThreadPart No.Dimension (mm)Thread
AB (Hex)AB (Hex)
EPG-29632.5026.980.803-14UNS-2B-RH-INTEPG-32031.023.810.825-14NGO-RH-EXT
EPG-51032.5030.160.885-14NGO-LH-INTEPG-32630.023.810.825-14NGO-RH-EXT
EPG-58032.5031.750.965-14NGO-RH-INTEPG-33031.023.810.825-14NGO-LH-EXT
EPG-59032.5031.750.965-14NGO-LH-INTEPG-35030.023.810.825-14NGO-LH-EXT
EPG-54030.026.980.903-14NGO-RH-EXT
EPG-66026.028.571.030-14NGO-RH-EXT
EPG-67026.028.571.030-14NGO-LH-EXT
EPG-67826.028.571.030-14NGO-LH-EXT
EPG-67926.028.571.030-14NGO-LH-EXT
EPG-21R31.023.81JIS21-14-OR
EPG-21L31.023.81JIS21-14-OL
EPG-22R31.023.81JIS22-14-OR
EPG-22L31.023.81JIS22-14-OL
EPG-23R31.025.4JIS23-14-OR
EPG-26R31.028.57JIS26-14-OR
EPG-26L31.028.57JIS26-14-OL

How to order

CGA Series

Part NoCGA
No.
TypeOrdering Part Number
Assembled
Set
GlandGland "L" BearingNutNut GasketGasketPlugPlug
inchmmThreadHex FlatMaterialThread
UCC-C296L10-DM-EP296AUCC-C296BUGL-08S2.5765.3XEMN-0803R0.803-14UNS-2A-RH-EXT23.81XX0.803-14UNS-2B-RH-INTEPG-296
UCC-C320L10-DM-EP320BUCC-C320BUGL-01S2.0752.5EBR-01EFN-0830R0.830-14NGO-RH-INT30.16CGT-01APCTFE/R0.825-14NGO-RH-EXTEPG-320
UCC-C326L10-DM-EP326CUCC-C326BUGL-04S2.6166.2EBR-01EFN-0830R0.830-14NGO-RH-INT30.16XX0.825-14NGO-RH-EXTEPG-326
UCC-C330L10-DM-EP330BUCC-C330BUGL-01S2.0752.5EBR-01EFN-0830L0.830-14NGO-LH-INT30.16CGT-01APCTFE/R0.825-14NGO-LH-EXTEPG-330
UCC-C350L10-DM-EP350CUCC-C350BUGL-05S2.6366.8EBR-01EFN-0830L0.830-14NGO-LH-INT30.16XX0.825-14NGO-LH-EXTEPG-350
UCC-C510L10-DM-EP510AUCC-C510BUGL-06S2.5765.3XEMN-0880L0.880-14NGO-LH-EXT23.81XX0.885-14NGO-LH-INTEPG-510
UCC-C540L10-DM-EP540CUCC-C540BUGL-09S2.6366.7EBR-02EFN-0908R0.908-14NGO-RH-INT30.16XX0.903-14NGO-RH-EXTEPG-540
UCC-C580L10-DM-EP580AUCC-C580BUGL-06S2.5765.3XEMN-0960R0.960-14NGO-RH-EXT26.98XX0.965-14NGO-RH-INTEPG-580
UCC-C590L10-DM-EP590AUCC-C590BUGL-06S2.5765.3XEMN-0960L0.960-14NGO-LH-EXT26.98XX0.965-14NGO-LH-INTEPG-590
UCC-C660L10-DM-EP660BUCC-C660BUGL-03S2.2858.0EBR-02EFN-1035R1.035-14NGO-RH-INT31.75CGT-03APCTFE/R1.030-14NGO-RH-EXTEPG-660
UCC-C670L10-DM-EP670BUCC-C670BUGL-03S2.2858.0EBR-02EFN-1035L1.035-14NGO-LH-INT31.75CGT-03APCTFE/R1.030-14NGO-LH-EXTEPG-670
UCC-C678L10-DM-EP678BUCC-C678BUGL-07S2.6066.0EBR-02EFN-1035L1.035-14NGO-LH-INT31.75EGT-01BPCTFE1.030-14NGO-LH-EXTEPG-678
UCC-C679L10-DM-EP679BUCC-C679BUGL-10S2.6366.7EBR-02EFN-1035L1.035-14NGO-LH-INT31.75EGT-05BPCTFE1.030-14NGO-LH-EXTEPG-679

Gases Assignment Table

GASCGAJISDISSGASCGAJISDISS
Ammonia66022-R720Hydrogen35022-L724
Argon58022/23-R718Hydrogen Bromide33026-R634
Arsenic Pentafluoride  642Hydrogen Chloride33026-R634
Arsine35022-L632Hydrogen Fluoride66026-R638
Boron Trichloride66022-L634Hydrogen Iodide330 670
Boron Trifluoride33022-L642Hydrogen Selenide350 632
Bromochlorodifluoromethane660  Hydrogen Sulfide330 722
Bromotrifluoromethane660  Isobutane510  
Butane51023-L Isobutylene51023-L 
Carbon Dioxide320 716Krypton51022/23-R718
Carbon Monoxide35022-L724Neon58022/23-R718
Carbonyl Sulfide330  Nitrogen58022/23-R718
Chlorine66026-R728Nitrous Oxide580 712
Chlorine Trifluoride67026-L Oxygen74022/23-R714
Chlorodifluoromethane660  Perfluonopropane660 716
Chlorotrifluoromethane660  Phosgene66026-R 
Diborane35022-L632Phosphine350 632
Dichlorodifluoromethane660 716PhosphorusPentafluoride330 642
Dichlorofluoromethane660  Silane350 632
Dichlorosllane678 636Silioon Tetrachloride  636
Dichlorotetrafluoroethane660  Silicon Tetrafluoride330 642
Diethylzine510 726Sulphur Dioxide10, 16 660
Difluoroethylene35022-L Sulphur Hexafluoride326 716
Dimethylzinc  726Trichorosilane636  
Dimethylamine70522/26-L Trichlorotrifluoroethane660 716
Dimethylether51026-L Trichlorofluoromethane660  
Disllane632  Triethylaluminium510 726
Ethane35022-L Trifluoromethane660  
Ethyl Chloride30026-L Trimethylamine70526-L 
Ethylene35022-L Tungsten Hexafluoride670 638
Fluorine67922-R Vinyl Bromide51026-L 
Germane350 632Vinyl Chloride51026-L 
Halocarbons660 716Vinyl Fluoride35022-L 
Helium32622/23-R718Xenon58022/26-L718
Sources : CGA V1 2005, JIS B8244/B8246 1989, ISO/DOS 407 1983
This table is the reference only.

Features

UNILOK® Cylinder Connectors are designed and manufactured for the connection of high purity gases in process applications.


 


Helium Leak Test

UNILOK fittings are rated to a helium leak rate of less than 1x10-9 mbar.l/sec and tested in accordance with SEMA-90120391B-STD and SEMI F1-96.


Particle Contribution Test

According to ASTM F1394-92.


Moisture Contribution Test

According to SEMA-90120397B-STD.


Cleaning

All components are precisely cleaned with 18㏁ deionized water after the passivation procedure.

Reference specification : SEMI E49.6.


Assembling

According to SEMI E49.6.


Packaging

Each component is double bagged to ensure component cleanliness and to protect it from environmental contamination.

Referenced specification : SEMI E49.1.

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