カテゴリー
- UHP | Fittings | Cylinder Connectors | CGA Assembly
- Dimensions
- How to order
- Gases Assignment Table
- Features
Dimensions
▶Glands (Type A, Type B, Type C )
Type A | Type B | Type C | |||||||||||||||||
Part No. | Dimension (mm) | Part No. | Dimension (mm) | Part No. | Dimension (mm) | ||||||||||||||
E | L | E | F | A | B | C | D | A | B | C | D | ||||||||
BUGL-06S | 65.3 | 10.00 | 4.35 | 6.35 | BUGL-01S | 52.5 | 10.00 | 4.35 | 6.35 | BUGL-04S | 66.2 | 10.00 | 4.35 | 6.35 | |||||
BUGL-08S | 65.3 | BUGL-02S | 55.5 | BUGL-05S | 66.8 | ||||||||||||||
BUGL-03S | 58.0 | BUGL-09S | 66.7 | ||||||||||||||||
BUGL-07S | 66.1 | ||||||||||||||||||
BUGL-10S | 66.7 | ||||||||||||||||||
BUGL-11S | 55.5 |
▶Bearings ▶Gaskets
Part No. | Dimension (mm) | Part No. | Dimension (mm) | Part No. | Dimension (mm) | |||||||||||
A | B | C | A | B | C | A | B | C | ||||||||
EBR-01 | 12.8 | 18.5 | 5.7 | CGT-01A | 6.6 | 16.8 | 3.0 | CGT-01B | 7.5 | 15.4 | 1.6 | |||||
EBR-02 | 12.8 | 23.5 | 9.0 | CGT-02A | 10.3 | 17.3 | CGT-05B | 8.0 | 13.5 | |||||||
CGT-03A | 9.7 | 21.5 | PTFE instead of PCTFE is available upon request. To order, add - TF to the end of part number. Example : CGT-02A-TF | |||||||||||||
Part No. | Dimension (mm) | Thread | Part No. | Dimension (mm) | Thread | |||||||||
A | B (Hex) | A | B (Hex) | |||||||||||
EFN-0830L | 35.00 | 30.16 | 0.830-14NGO-LH-INT | EMN-0803R | 29.00 | 23.81 | 0.803-14UNS-2A-RH-EXT | |||||||
EFN-0830R | 35.00 | 30.16 | 0.830-14NGO-RH-INT | EMN-0880L | 29.00 | 23.81 | 0.880-14NGO-LH-EXT | |||||||
EFN-0908R | 35.00 | 30.16 | 0.908-14NGO-RH-INT | EMN-0960L | 29.00 | 26.98 | 0.960-14NGO-LH-EXT | |||||||
EFN-1035L | 36.00 | 31.75 | 1.035-14NGO-LH-INT | EMN-0960R | 29.00 | 26.98 | 0.960-14NGO-RH-EXT | |||||||
EFN-1035R | 36.00 | 31.75 | 1.035-14NGO-RH-INT | |||||||||||
EFN-JS21L | 35.00 | 30.16 | JIS21-14-OL | |||||||||||
EFN-JS21R | 35.00 | 30.16 | JIS21-14-OR | |||||||||||
EFN-JS22L | 35.00 | 30.16 | JIS22-14-OL | |||||||||||
EFN-JS22R | 35.00 | 30.16 | JIS22-14-OR | |||||||||||
EFN-JS23R | 35.00 | 30.16 | JIS23-14-OR | |||||||||||
EFN-JS26L | 36.00 | 31.75 | JIS26-14-OL | |||||||||||
EFN-JS26R | 36.00 | 31.75 | JIS26-14-OR |
|
▶Female plugs ▶Male plugs
Part No. | Dimension (mm) | Thread | Part No. | Dimension (mm) | Thread | |||||||||
A | B (Hex) | A | B (Hex) | |||||||||||
EPG-296 | 32.50 | 26.98 | 0.803-14UNS-2B-RH-INT | EPG-320 | 31.0 | 23.81 | 0.825-14NGO-RH-EXT | |||||||
EPG-510 | 32.50 | 30.16 | 0.885-14NGO-LH-INT | EPG-326 | 30.0 | 23.81 | 0.825-14NGO-RH-EXT | |||||||
EPG-580 | 32.50 | 31.75 | 0.965-14NGO-RH-INT | EPG-330 | 31.0 | 23.81 | 0.825-14NGO-LH-EXT | |||||||
EPG-590 | 32.50 | 31.75 | 0.965-14NGO-LH-INT | EPG-350 | 30.0 | 23.81 | 0.825-14NGO-LH-EXT | |||||||
EPG-540 | 30.0 | 26.98 | 0.903-14NGO-RH-EXT | |||||||||||
EPG-660 | 26.0 | 28.57 | 1.030-14NGO-RH-EXT | |||||||||||
EPG-670 | 26.0 | 28.57 | 1.030-14NGO-LH-EXT | |||||||||||
EPG-678 | 26.0 | 28.57 | 1.030-14NGO-LH-EXT | |||||||||||
EPG-679 | 26.0 | 28.57 | 1.030-14NGO-LH-EXT | |||||||||||
EPG-21R | 31.0 | 23.81 | JIS21-14-OR | |||||||||||
EPG-21L | 31.0 | 23.81 | JIS21-14-OL | |||||||||||
EPG-22R | 31.0 | 23.81 | JIS22-14-OR | |||||||||||
EPG-22L | 31.0 | 23.81 | JIS22-14-OL | |||||||||||
EPG-23R | 31.0 | 25.4 | JIS23-14-OR | |||||||||||
EPG-26R | 31.0 | 28.57 | JIS26-14-OR | |||||||||||
EPG-26L | 31.0 | 28.57 | JIS26-14-OL |
How to order
CGA Series
Part No | CGA No. | Type | Ordering Part Number | |||||||||||
Assembled Set | Gland | Gland "L" | Bearing | Nut | Nut | Gasket | Gasket | Plug | Plug | |||||
inch | mm | Thread | Hex Flat | Material | Thread | |||||||||
UCC-C296L10-DM-EP | 296 | A | UCC-C296 | BUGL-08S | 2.57 | 65.3 | X | EMN-0803R | 0.803-14UNS-2A-RH-EXT | 23.81 | X | X | 0.803-14UNS-2B-RH-INT | EPG-296 |
UCC-C320L10-DM-EP | 320 | B | UCC-C320 | BUGL-01S | 2.07 | 52.5 | EBR-01 | EFN-0830R | 0.830-14NGO-RH-INT | 30.16 | CGT-01A | PCTFE/R | 0.825-14NGO-RH-EXT | EPG-320 |
UCC-C326L10-DM-EP | 326 | C | UCC-C326 | BUGL-04S | 2.61 | 66.2 | EBR-01 | EFN-0830R | 0.830-14NGO-RH-INT | 30.16 | X | X | 0.825-14NGO-RH-EXT | EPG-326 |
UCC-C330L10-DM-EP | 330 | B | UCC-C330 | BUGL-01S | 2.07 | 52.5 | EBR-01 | EFN-0830L | 0.830-14NGO-LH-INT | 30.16 | CGT-01A | PCTFE/R | 0.825-14NGO-LH-EXT | EPG-330 |
UCC-C350L10-DM-EP | 350 | C | UCC-C350 | BUGL-05S | 2.63 | 66.8 | EBR-01 | EFN-0830L | 0.830-14NGO-LH-INT | 30.16 | X | X | 0.825-14NGO-LH-EXT | EPG-350 |
UCC-C510L10-DM-EP | 510 | A | UCC-C510 | BUGL-06S | 2.57 | 65.3 | X | EMN-0880L | 0.880-14NGO-LH-EXT | 23.81 | X | X | 0.885-14NGO-LH-INT | EPG-510 |
UCC-C540L10-DM-EP | 540 | C | UCC-C540 | BUGL-09S | 2.63 | 66.7 | EBR-02 | EFN-0908R | 0.908-14NGO-RH-INT | 30.16 | X | X | 0.903-14NGO-RH-EXT | EPG-540 |
UCC-C580L10-DM-EP | 580 | A | UCC-C580 | BUGL-06S | 2.57 | 65.3 | X | EMN-0960R | 0.960-14NGO-RH-EXT | 26.98 | X | X | 0.965-14NGO-RH-INT | EPG-580 |
UCC-C590L10-DM-EP | 590 | A | UCC-C590 | BUGL-06S | 2.57 | 65.3 | X | EMN-0960L | 0.960-14NGO-LH-EXT | 26.98 | X | X | 0.965-14NGO-LH-INT | EPG-590 |
UCC-C660L10-DM-EP | 660 | B | UCC-C660 | BUGL-03S | 2.28 | 58.0 | EBR-02 | EFN-1035R | 1.035-14NGO-RH-INT | 31.75 | CGT-03A | PCTFE/R | 1.030-14NGO-RH-EXT | EPG-660 |
UCC-C670L10-DM-EP | 670 | B | UCC-C670 | BUGL-03S | 2.28 | 58.0 | EBR-02 | EFN-1035L | 1.035-14NGO-LH-INT | 31.75 | CGT-03A | PCTFE/R | 1.030-14NGO-LH-EXT | EPG-670 |
UCC-C678L10-DM-EP | 678 | B | UCC-C678 | BUGL-07S | 2.60 | 66.0 | EBR-02 | EFN-1035L | 1.035-14NGO-LH-INT | 31.75 | EGT-01B | PCTFE | 1.030-14NGO-LH-EXT | EPG-678 |
UCC-C679L10-DM-EP | 679 | B | UCC-C679 | BUGL-10S | 2.63 | 66.7 | EBR-02 | EFN-1035L | 1.035-14NGO-LH-INT | 31.75 | EGT-05B | PCTFE | 1.030-14NGO-LH-EXT | EPG-679 |
Gases Assignment Table
GAS | CGA | JIS | DISS | GAS | CGA | JIS | DISS |
Ammonia | 660 | 22-R | 720 | Hydrogen | 350 | 22-L | 724 |
Argon | 580 | 22/23-R | 718 | Hydrogen Bromide | 330 | 26-R | 634 |
Arsenic Pentafluoride | 642 | Hydrogen Chloride | 330 | 26-R | 634 | ||
Arsine | 350 | 22-L | 632 | Hydrogen Fluoride | 660 | 26-R | 638 |
Boron Trichloride | 660 | 22-L | 634 | Hydrogen Iodide | 330 | 670 | |
Boron Trifluoride | 330 | 22-L | 642 | Hydrogen Selenide | 350 | 632 | |
Bromochlorodifluoromethane | 660 | Hydrogen Sulfide | 330 | 722 | |||
Bromotrifluoromethane | 660 | Isobutane | 510 | ||||
Butane | 510 | 23-L | Isobutylene | 510 | 23-L | ||
Carbon Dioxide | 320 | 716 | Krypton | 510 | 22/23-R | 718 | |
Carbon Monoxide | 350 | 22-L | 724 | Neon | 580 | 22/23-R | 718 |
Carbonyl Sulfide | 330 | Nitrogen | 580 | 22/23-R | 718 | ||
Chlorine | 660 | 26-R | 728 | Nitrous Oxide | 580 | 712 | |
Chlorine Trifluoride | 670 | 26-L | Oxygen | 740 | 22/23-R | 714 | |
Chlorodifluoromethane | 660 | Perfluonopropane | 660 | 716 | |||
Chlorotrifluoromethane | 660 | Phosgene | 660 | 26-R | |||
Diborane | 350 | 22-L | 632 | Phosphine | 350 | 632 | |
Dichlorodifluoromethane | 660 | 716 | PhosphorusPentafluoride | 330 | 642 | ||
Dichlorofluoromethane | 660 | Silane | 350 | 632 | |||
Dichlorosllane | 678 | 636 | Silioon Tetrachloride | 636 | |||
Dichlorotetrafluoroethane | 660 | Silicon Tetrafluoride | 330 | 642 | |||
Diethylzine | 510 | 726 | Sulphur Dioxide | 10, 16 | 660 | ||
Difluoroethylene | 350 | 22-L | Sulphur Hexafluoride | 326 | 716 | ||
Dimethylzinc | 726 | Trichorosilane | 636 | ||||
Dimethylamine | 705 | 22/26-L | Trichlorotrifluoroethane | 660 | 716 | ||
Dimethylether | 510 | 26-L | Trichlorofluoromethane | 660 | |||
Disllane | 632 | Triethylaluminium | 510 | 726 | |||
Ethane | 350 | 22-L | Trifluoromethane | 660 | |||
Ethyl Chloride | 300 | 26-L | Trimethylamine | 705 | 26-L | ||
Ethylene | 350 | 22-L | Tungsten Hexafluoride | 670 | 638 | ||
Fluorine | 679 | 22-R | Vinyl Bromide | 510 | 26-L | ||
Germane | 350 | 632 | Vinyl Chloride | 510 | 26-L | ||
Halocarbons | 660 | 716 | Vinyl Fluoride | 350 | 22-L | ||
Helium | 326 | 22/23-R | 718 | Xenon | 580 | 22/26-L | 718 |
Sources : CGA V1 2005, JIS B8244/B8246 1989, ISO/DOS 407
1983 This table is the reference only. | |||||||
Features
UNILOK® Cylinder Connectors are designed and manufactured for the connection of high purity gases in process applications.
Helium Leak Test
UNILOK fittings are rated to a helium leak rate of less than 1x10-9 mbar.l/sec and tested in accordance with SEMA-90120391B-STD and SEMI F1-96.
Particle Contribution Test
According to ASTM F1394-92.
Moisture Contribution Test
According to SEMA-90120397B-STD.
Cleaning
All components are precisely cleaned with 18㏁ deionized water after the passivation procedure.
Reference specification : SEMI E49.6.
Assembling
According to SEMI E49.6.
Packaging
Each component is double bagged to ensure component cleanliness and to protect it from environmental contamination.
Referenced specification : SEMI E49.1.