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VCA100 series
ALD Valve
カテゴリー
- UHP | Valves | ALD Valves
- Dimensions
- Ordering Information
- Specification
Dimensions
Type | Part Number | A | B | C | D | E | H |
IGS | VCA100-11W | 28.6 | Ø4.4
Through holes 2Port : 4ea / 3Prot : 6ea | 28.4 | 10 | - | 81.5 mm (Normal Type) 106.9 mm (High Temp. Type) |
VCA100-11C | 28.6 | Ø4.4
Through holes 2/3Port : 4ea | 28.4 | 7.75 | - | ||
UCR | VCA100-04M | 26 | Four M5 Tap P.C.D 25.4 | 37.8 | 58.4 | 11.1 | 84.2 mm (Normal Type) 109.6 mm (High Temp. Type) |
VCA100-04F | 26 | Four M5 Tap P.C.D 25.4 | 37.8 | 70.6 | 11.1 |
Ordering Information
Part Number | Connection Option | Max Temp. Option | Sensor Option | Operation Type | |||
Size | Type | Port | |||||
VCA100 | 11
: 1.125“ 04 : 1/4“ | W
: W-Seal C : C-Seal M : UCR Male F : UCR Female | 2
: 2 Port 3 : 3 Port | 1
: 120°C 2 : 200°C | 1
: N/A 2 : Actuator Sensor | 1
: Pneumatic N.C 2 : Pneumatic N.O |
Specification
Cv Value | 0.27 | ||
Working Pressure | Vacuum to 145 psig | ||
Max. Working Temp | Normal Type : 0~120°C(32~248°F) High Temp. Type : 0~200°C(32~392°F) | ||
Inboard leakage Allowance-He | ≤ 1x10-9 atm.cc/s | ||
Internal leakage Allowance-He | ≤ 1x10-9 atm.cc/s | ||
Materials | Body | 316L VAR SS | |
Actuator | ALUMINUM |