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VCG
Vacuum Generator

カテゴリー

  • UHP | Other | Vacuum Generator
  • Ordering Information & Dimensions
  • How To Order
  • Specification
  • Features

Ordering Information & Dimensions

Part No.End ConnectionDimensions(mm)
InletOutletVacuumALHh
VCGC-04M04M08M-Male UCR35.070.031.032.0
VCGC-04F04F08F-Female UCR80.0
VCGCWB-04M04M04T-Male UCRTube Butt Weld

How To Order

VCGC-04M08M04M-SL-BA
Valve Type Inlet
Connection
Size
Connection
Type
Outlet
Connection
Size
Connection
Type
Vacuum
Connection Size
Connection
Type
Body
Material
Surface
Finish Level
Valve TypeInlet Connection SizeMaterials
VCGVacuum GeneratorFractional(Inch) Tube O.D. DesignationDM316LSS-SEMI F20
Tube
O.D
inch1/43/81/2SL316L SS
Connection Typemm6.359.5212.70
C-*MMale UCRDesignator04T06T08TSurface Finish Level
C-*FFemale UCRBABA - Bright Annealing
WB-Tube Butt WeldUCR Size DesignatorEPEP-Electro Polished
UCR Size1/41/2
Designator0408

Specification

Orifice Size1.35mm
Ultimate Vacuum50torr (66.7mbar)
Gas Flow at Ultimate60 l/min
Gas Pressure at Ultimate80psig
Optimize working Pressure80~100psig
Max. Working Pressure150psig (10kgf/cm²)
Operating Temperature0~150℃


Helium Leak Test  

Every VCG series are inboard helium leak tested to a rate of 1x10-9 cm3 /sec. 


Particle Contribution Test 

According to ASTM F1394-92. 


Moisture Contribution Test 

According to SEMA-90120397B-STD. 


Vacuum and Flow Chart 


Cleaning 

All components are precisely cleaned with 18㏁ deionized water after the passivation procedure in accordance with our own UHP cleaning process Reference specification : SEMI E49.6. 


Packaging 

Each component is double bagged to ensure component cleanliness and to protect them from environmental contamination. 

Referenced specification : SEMI E49.1. 

Features

· Function of the pressure of the purge gas which flows through the generator. 

· Low space requirement.&nbsp

· Extremely fast evacuation time.

· All performed in class 100 and class 10 clean rooms.

· Stainless Steel 316L construction.

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