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VCD3L series (Pneumatic Operation)
High Flow Type Low Pressure Diaphragm Valve - Pneumatic Actuating Operation
카테고리
- UHP|Valves|Diaphragm Valves
PDF 다운로드
- Dimensions
- Specification
- Festures
Dimensions
| Ordering Information & Dimensions | ||||||||||
| Part Number | End Connection | Dimensions (mm) | ||||||||
| Inlet | Outlet | L | h | H | F | E(Φ) | K | W(Φ) | ||
| VCDHHF | C-04F- | 1/4“ Female UCR | 70.6 | 11.1 | (83.1) | 26 | 25.4 | M5 | 43 | |
| C-04MR- | 1/4“ Swivel Male UCR | |||||||||
Specification
| Size | 1/4” |
| CV Value | 0.3 |
| Max Working Pressure | 20 bar (300 psig) |
| Actuator Pressure Rating | 5~7 bar |
| Max. Working Temperature | -10~80˚C |
| Inboard leakage Allowance-He | ≤1x10-9 atm.cc/s |
| Internal leakage Allowance-He | ≤1x10-9 atm.cc/s |
Festures
| A compactly designed body with minimal dead space. |
| Body materials comply with SEMI F-20, “Specification for 316LSS Materials for UHP (Ultra High Purity) Grade Semiconductor Manufacturing Applications” |
| Maximum flow capacity |
| Minimal particle generation |
| Minimal contributions of moisture, oxygen and hydrocarbon with UNILOK’s own special cleaning process in a certified clean room |
| Excellent finish level of wetted areas with UNILOK’s own electro polish process |
| Elgiloy® diaphragm material with strong durability as well as corrosion resistance for long cycle life |
| PCTFE seat material with remarkable chemical and thermal resistance |
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