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- Ordering Information & Dimensions
- How To Order
- Specification
- Performance Data
Ordering Information & Dimensions
 |
Part Number | Dimensions (mm) | ||||
| A | B | C | D | E | ||
| FIGS-11W-030-LVSL | 82.3 | 22 | 28.6 | 20 | 21.8 | |
How To Order
| FIGS | ▬ | 11 | W | ▬ | 030 | ▬ | LV | SL |
| Filter Type | Connection Type |
Connection Size |
Rated Flow | Housing Material |
Element Material |
| Filter Type | Connection Size | Housing Materials | |||||
| FIGS | IGS Filter | W | W-seal | LV | 316L VAR | ||
| C | C-seal | H2 | Hastelloy C22 | ||||
| Connection Type | |||||||
| 11 | 1.125” | Rated Flow (SLPM) | Element Materials | ||||
| 15 | 1.5” | 030 | 30 | SL | 316L SS | ||
| H2 | Hastelloy C22 | ||||||
Specification
| Removal Rating | ≥ 0.0015㎛ |  |
|
| Retention | ≥ 9LRV (99.9999999%) Confirmed at the most penetrating particle size of 0.0015㎛ and 0.08㎛ per SEMI F38 test method |
||
| Rated Flow | 30 SLPM | ||
| Material | Housing | Electropolished
316L VAR Hastelloy C22 |
|
| Element | 316L
SS Hastelloy C22 |
||
| Element Operating Condition |
Maximum Operating Pressure | 40 bar (580 psi) @ 20℃ | |
| Maximum Differential Pressure | 32 bar (465 psi) @ 20℃ | ||
| Maximum Operating Temperature | 460℃ | ||
| Helium Leak | 1ⅹ10-9 mbar.l/sec | ||
| Particle Shedding | Zero particle contribution above
background (<1 particle/ft3) per SEMI F43 test method |
||
| Surface Finish Interior | ≤ 5μinch Ra, Electro-polished | ||
Performance Data
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