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- Ordering Information & Dimensions
- How To Order
- Specification
- Performance Data
Ordering Information & Dimensions
 |
Part No. | Dimensions(mm) | ||
| A | B | C | ||
| FIN-0C04-005-LVSL | 84 | Φ38.1 | 27 | |
| FIN-0C04-015-LVSL | 84 | Φ38.1 | 27 | |
| FIN-0C08-030-LVSL | 84 | Φ38.1 | 27 | |
| FIN-0C08-030-H2H2 | 84 | Φ38.1 | 27 | |
How To Order
| FIN | ▬ | 0C | 08 | ▬ | 030 | ▬ | LV | SL |
| Filter Type | Connection Type |
Connection Size |
Rated Flow | Housing Material |
Element Material |
| Filter Type | Connection Size | Housing Materials | |||||
| FIN | Inline Filter | 04 | 1/4” | LV | 316L VAR | ||
| 08 | 1/2” | H2 | Hastelloy C22 | ||||
| Connection Type | |||||||
| 0C | UCR | Rated Flow (SLPM) | Element Materials | ||||
| 0U | Unilok Tube Fitting | 005 | 5 | SL | 316L SS | ||
| WB | Butt Weld | 015 | 15 | H2 | Hastelloy C22 | ||
| 030 | 30 | ||||||
Specification
| Removal Rating | ≥ 0.0015㎛ |  |
|
| Retention | ≥ 9LRV (99.9999999%) Confirmed at the most penetrating particle size of 0.0015㎛ and 0.08㎛ per SEMI F38 test method |
||
| Rated Flow | 5 SLPM / 15 SLPM / 30 SLPM | ||
| Material | Housing | Electropolished
316L VAR Hastelloy C22 |
|
| Element | 316L
SS Hastelloy C22 |
||
| Element Operating Condition |
Maximum Operating Pressure | 172 bar (2,500 psi) @ 20℃ | |
| Maximum Differential Pressure | 138 bar (2,000 psi) @ 20℃ | ||
| Maximum Operating Temperature | 460℃ | ||
| Helium Leak | 1ⅹ10-9 mbar.l/sec | ||
| Particle Shedding | Zero
particle contribution above background (<1 particle/ft3) per SEMI F43 test method |
||
| Surface Finish Interior | ≤ 5μinch Ra, Electro-polished | ||
Performance Data
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