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VCA100 series
ALD Valve
카테고리
- UHP | Valves | ALD Valves
- Dimensions
- Ordering Information
- Specification
Dimensions
| Type | Part Number | A | B | C | D | E | H |
| UCR | VCA100-04M | 26 | Four M5 Tap P.C.D 25.4 | 37.8 | 58.4 | 11.1 | 84.2 mm (Normal Type) 109.6 mm (High Temp. Type) |
| VCA100-04F | 26 | Four M5 Tap P.C.D 25.4 | 37.8 | 70.6 | 11.1 |
Ordering Information
| Part Number | Connection Option | Max Temp. Option | Sensor Option | Operation Type | |||
| Size | Type | Port | |||||
| VCA100 | 11
: 1.125“ 04 : 1/4“ | W
: W-Seal C : C-Seal M : UCR Male F : UCR Female | 2
: 2 Port 3 : 3 Port | 1
: 120°C 2 : 200°C | 1
: N/A 2 : Actuator Sensor | 1
: Pneumatic N.C 2 : Pneumatic N.O | |
Specification
| Cv Value | 0.27 | ||
| Working Pressure | Vacuum to 145 psig | ||
| Max. Working Temp | Normal Type : 0~120°C(32~248°F) High Temp. Type : 0~200°C(32~392°F) | ||
| Inboard leakage Allowance-He | ≤ 1x10-9 atm.cc/s | ||
| Internal leakage Allowance-He | ≤ 1x10-9 atm.cc/s | ||
| Materials | Body | 316L VAR SS | |
| Actuator | ALUMINUM | ||
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