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- Ordering Information & Dimensions
- How To Order
- Specification
- Performance Data
Ordering Information & Dimensions
 |
Part No. | Dimensions(mm) | ||
| L | D | H | ||
| FIN-C04-5VL | 84 | Φ21 | 22.22 | |
| FIN-C04-15VL | 127 | Φ21 | 22.22 | |
| FIN-C04-15VL-S | 84 | Φ38.1 | 27 | |
| FIN-C04-30HH | ||||
| FIN-C08-30VL | ||||
| Dimensions are for reference only and are subject to change without prior notice. | ||||
How To Order
| FIN | ▬ | C | 08 | ▬ | 30 | V | L | ▬ | |||
| Filter Type | Connection | Connection | Rated Flow | Housing | Element | Option | |||||
| Type | Size | Material | Material |
| Filter Type | Connection Size | Housing Materials | |||||
| FIN | Inline Filter | 04 | 1/4” | V | 316L VAR | ||
| 08 | 1/2” | H | Hastelloy C22 | ||||
| Connection Type | |||||||
| C | UCR | Rated Flow (SLPM) | Element Materials | ||||
| U | Unilok Tube Fitting | 5 | 5 | L | 316L SS | ||
| WB | Butt Weld | 15 | 15 | H | Hastelloy C22 | ||
| 30 | 30 | ||||||
| Option | |||||||
| None | Default | ||||||
| S | Compact Size | ||||||
Specification
| Removal Rating | ≥ 0.0015㎛ |  |
|
| Retention | ≥ 9LRV
(99.9999999%) Confirmed at the most penetrating particle size of 0.0015㎛ and 0.08㎛ per SEMI F38 test method |
||
| Rated Flow | 5 SLPM | up to 15 SLPM | |
| 15 SLPM | up to 30 SLPM | ||
| 30 SLPM | up to 60 SLPM | ||
| Material | Housing | Electropolished
316L VAR Hastelloy C22 |
|
| Element | 316L
SS Hastelloy C22 |
||
| Element Operating Condition |
Maximum Operating Pressure | 172 bar (2,500 psi) @ 20℃ | |
| Maximum Differential Pressure | 138 bar (2,000 psi) @ 20℃ | ||
| 460℃ | |||
| Helium Leak | 1ⅹ10-9 mbar.l/sec | ||
| Particle Shedding | Zero
particle contribution above background (<1 particle/ft3) per SEMI F43 test method |
||
| Surface Finish Interior | ≤ 5μinch Ra, Electro-polished | ||
| 1) The maximum operating pressure that the filter housing and
seals can continuously withstand during normal process operation without rupture or leakage. 2) The maximum differential pressure across the filter element that the porous membrane or sintered structure can endure without collapse, tear, or particle shedding. |
|||
Performance Data
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