Category
- UHP | Other | Vacuum Generator
- Ordering Information & Dimensions
- How To Order
- Specification
- Features
Ordering Information & Dimensions
| Part No. | End Connection | Dimensions(mm) | ||||||
| Inlet | Outlet | Vacuum | A | L | H | h | ||
| VCGC-04M04M08M- | Male UCR | 35.0 | 70.0 | 31.0 | 32.0 | |||
| VCGC-04F04F08F- | Female UCR | 80.0 | ||||||
| VCGCWB-04M04M04T- | Male UCR | Tube Butt Weld | ||||||
How To Order
| VCGC | - | 04 | M | 08 | M | 04 | M | - | SL | - | BA |
| Valve Type | Inlet Connection Size | Connection Type | Outlet Connection Size | Connection Type | Vacuum Connection Size | Connection Type | Body Material | Surface Finish Level | |||
| Valve Type | Inlet Connection Size | Materials | |||||||||||
| VCG | Vacuum Generator | Fractional(Inch) Tube O.D. Designation | DM | 316LSS-SEMI F20 | |||||||||
| Tube O.D | inch | 1/4 | 3/8 | 1/2 | SL | 316L SS | |||||||
| Connection Type | mm | 6.35 | 9.52 | 12.70 | |||||||||
| C-*M | Male UCR | Designator | 04T | 06T | 08T | Surface Finish Level | |||||||
| C-*F | Female UCR | BA | BA - Bright Annealing | ||||||||||
| WB- | Tube Butt Weld | UCR Size Designator | EP | EP-Electro Polished | |||||||||
| UCR Size | 1/4 | 1/2 | |||||||||||
| Designator | 04 | 08 | |||||||||||
Specification
| Orifice Size | 1.35mm |
| Ultimate Vacuum | 50torr (66.7mbar) |
| Gas Flow at Ultimate | 60 l/min |
| Gas Pressure at Ultimate | 80psig |
| Optimize working Pressure | 80~100psig |
| Max. Working Pressure | 150psig (10kgf/cm²) |
| Operating Temperature | 0~150℃ |
Helium Leak Test
Every VCG series are inboard helium leak tested to a rate of 1x10-9 cm3 /sec.
Particle Contribution Test
According to ASTM F1394-92.
Moisture Contribution Test
According to SEMA-90120397B-STD.
Vacuum and Flow Chart
Cleaning
All components are precisely cleaned with 18㏁ deionized water after the passivation procedure in accordance with our own UHP cleaning process Reference specification : SEMI E49.6.
Packaging
Each component is double bagged to ensure component cleanliness and to protect them from environmental contamination.
Referenced specification : SEMI E49.1.
Features
· Function of the pressure of the purge gas which flows through the generator.
· Low space requirement. 
· Extremely fast evacuation time.
· All performed in class 100 and class 10 clean rooms.
· Stainless Steel 316L construction.
이전
top
