Category
- UHP | Valves | Diaphragm Valves
- Dimensions
- How To Order
- Specification
- Features
Dimensions
| Part No. | End Connection | Dimensions (mm) | |||||||||
| Inlet | Outlet | L | H | h1 | h2 | W | E | F | K | ||
| VCDH | C-04M- | 1/4“ Male UCR | 58.7 | 110.6 | 11.1 | 71.7 | 48.0 | 25.4 | 26.0 | M5 | |
| C-04F- | 1/4“ Female UCR | 70.6 | |||||||||
| C-08M- | 1/2” Male UCR | 73.6 | 121.4 | 16.0 | 70.6 | 62.0 | 28.0 | 37.0 | |||
| C-08F- | 1/2” Female UCR | 83.0 | |||||||||
How To Order
UNILOK VCD series valves are ordered by part number as shown as below.
Example : The following part number,VCDLC 04M-PO-SL-EP is designated for Low Pressure Diaphragm Valve, both 1/4” Male UCR, Pneumatic
Normal Open Operation, 316LSS, EP.
| VC | DH | C | - | - | 04 | M | - | PC | R | - | - | SL | - | EP | H | - | S001 | - | PI | - | PN | ||
| ① | ② | ③ | ④ | ⑤ | ⑥ | ⑦ | ⑧ | ⑨ | ⑩ | ⑪ | ⑫ | ⑬ | ⑭ | ⑮ | |||||||||
| Industry Sector | Valve Type | Connection Type | Flow Path Pattern | Connectin Size | Connectin Type (In detail) | Operation (Operation Type) | Handle & Label Color | Bleed Option | Material | Surface Finish Level | Option-2 (Open/Close Color) | Option-3 (Overall Body Length Size) | Option-4 (Seat Material) | Option-5 (Panel Nut) | |||||||||
| ① Type | ⑥ Connectin Type (In detail) | ⑪ Surface Finish Level | |||||||||||||
| VC | UHP | T | Tube(U-**T, WB-**T) | BA | Bright Annealing | ||||||||||
| P | Pipe(WB-**P) | EP | Electro Polished | ||||||||||||
| ② Valve Type | M | Male UCR(C-**M) | |||||||||||||
| DL | Standard Low Pressure | F | Female UCR(C-**F) | ⑫ Option-2 (Open/Close Color) | |||||||||||
| DH | Standard High Pressure | MR | Rotable Male UCR(C-**MR) | None | Open-Red, Close-Blue | ||||||||||
| DS | Shut off | H | Open-Blue, Close-Red | ||||||||||||
| DDH | Directional High Pressure | ⑦ Operation-1 (Operation type) | |||||||||||||
| DFL | Forged Low Body | None / M | Manual Indicator Handle | ⑬ Option-3 (Overall body length size) | |||||||||||
| DHHF | High Pressure High Flow | RI | Manual Round Indicator Handle | None | Standard Length | ||||||||||
| DMHF | Mid Pressure High Flow | MI | Manual Indicator+Directional Handle | S001/KZ | Low Pressure 1/2"(F)83=KZ Code, Low Pressure 1/4"(F)76.2, (M)57/Low Pressure 1/2"(M)76.2 | ||||||||||
| DLHF | Low Pressure High Flow | PO | Pneumatic - Normal Open | ||||||||||||
| DUHF | Low Pressure Ultra High Flow | PC | Pneumatic - Normal Close | S002/FN | High Pressure 1/4"(F)71.6 | ||||||||||
| BL | Standard Low Pressure | S003 | High Pressure & High Flow 1/2"(F) 120.9 | ||||||||||||
| BF | Forged Body | ⑧ Handle & Label Color | 76-S23 | High Pressure 1/4", 76: Overall Length, S23: Bracket Square Size | |||||||||||
| None | Blue | L76.2 | Low Pressure 1/4"(F)76.2 / Low Pressure 1/2"(M)76.2 | ||||||||||||
| Diaphragm Valve | R | Red | 54 | Low Pressure 1/4"(WB)54 | |||||||||||
| Bellows Valve | G | Green | 69 | Low Pressure 1/2",3/8" (WB)69 | |||||||||||
| B | Black | ||||||||||||||
| ③ Connection Type | V | Silver | ⑭ Option-4(Seat material) | ||||||||||||
| U | Unilok Tube Fitting | W | White | None | PCTFE(-10~80°C) | ||||||||||
| C | UHP UCR Fitting | PI / V | PI / VESPEL(-10~150°C) | ||||||||||||
| WB | Butt Weld | ⑨ Bleed Option | PFA / F | PFA(-10~150°C) | |||||||||||
| FL | Flanged | None | No Bleed | ||||||||||||
| 3 | Constant Bleed Ø0.3 | ⑮ Option-5(Panel Nut) | |||||||||||||
| ④ Flow Path Pattern | 6 | Constant Bleed Ø0.6 | None | Not assembled Panel Nut | |||||||||||
| For DBL and DBH series | PN | Assembled panel Nut | |||||||||||||
| ⑩ Material | |||||||||||||||
| ⑤ Connectin Size | DM | 316LSS - SEMI F20 | |||||||||||||
| 04 | 1/4" | SL | 316LSS | ||||||||||||
| 06 | 3/8" | ||||||||||||||
| 08 | 1/2" | ||||||||||||||
| 12 | 3/4" | ||||||||||||||
| 16 | 1" | ||||||||||||||
Specification
| Size | 1/4" | 3/4" | |||
| Orifice Size | 4.3 | 6.5 | |||
| Cv Value | 0.1 | 0.3 | |||
| Max. Working Pressure | 206 bar | ||||
| Max. Working Temperature | -10~40°C (14~104°F) | ||||
| Actuator Pressure Rating | 5~7 bar (73~101 psig) | ||||
| Internal Leakage Allowance - He | ≤ 1x10-9 atm.cc/s | ||||
| External Leakage Allowance - He | ≤ 1x10-9 atm.cc/s | ||||
Features
A compactly designed body with minimal dead space.
Body materials comply with SEMI F-20, “Specification for 316LSS Materials for UHP (Ultra High Purity) Grade Semiconductor Manufacturing Applications”
Maximum flow capacity
Minimal particle generation
Minimal contributions of moisture, oxygen and hydrocarbon with UNILOK’s own special cleaning process in a certified clean room
Excellent finish level of wetted areas with UNILOK’s own electro polish process
Elgiloy® diaphragm material with strong durability as well as corrosion resistance for long cycle life
PCTFE seat material with remarkable chemical and thermal resistance
이전
top
