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VCDS series (LOTO)
Shut Off Type Low Pressure Diaphragm Valve – LOTO

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  • UHP | Valves | Diaphragm Valves
  • Dimensions
  • How To Order
  • Specification
  • Features

Dimensions


Part No.End ConnectionDimensions (mm)
InletOutletLHh1h2h3WEFK
VCDSC-04M-1/4" Male UCR57.092.811.140.78.32825.426M5
C-04F-1/4" Female UCR70.6
C-08M-1/2" Male UCR73.6124.81646.56.6402837
C-08F-1/2" Female UCR83.0

How To Order

UNILOK VCD series valves are ordered by part number as shown as below.

Example : The following part number,VCDLC 04M-PO-SL-EP is designated for Low Pressure Diaphragm Valve, both 1/4” Male UCR, Pneumatic 

Normal Open Operation, 316LSS, EP.


VCDSC- -04M-PCR- -SL-EPH-S001-PI-PN
Industry
Sector
Valve
Type
Connection Type
Flow Path
Pattern
Connectin
Size
Connectin Type (In detail)
Operation (Operation Type)
Handle &
Label Color
Bleed
Option
MaterialSurface
Finish Level
Option-2 (Open/Close Color)
Option-3 (Overall Body Length Size)
Option-4
(Seat Material)
Option-5 (Panel Nut)
① Type⑥ Connectin Type (In detail)⑪ Surface Finish Level
VCUHPTTube(U-**T, WB-**T)BABright Annealing
PPipe(WB-**P)EPElectro Polished
② Valve TypeMMale UCR(C-**M)
DLStandard Low PressureFFemale UCR(C-**F)⑫ Option-2 (Open/Close Color)
DHStandard High PressureMRRotable Male UCR(C-**MR)NoneOpen-Red, Close-Blue
DSShut offHOpen-Blue, Close-Red
DDHDirectional High Pressure⑦ Operation-1 (Operation type)
DFLForged Low BodyNone / MManual Indicator Handle⑬ Option-3 (Overall body length size)
DHHFHigh Pressure High FlowRIManual Round Indicator HandleNone

Standard Length

DMHFMid Pressure High FlowMIManual Indicator+Directional HandleS001/KZ

Low Pressure 1/2"(F)83=KZ Code, Low Pressure 1/4"(F)76.2, (M)57/Low Pressure 1/2"(M)76.2

DLHFLow Pressure High FlowPOPneumatic - Normal Open
DUHFLow Pressure Ultra High FlowPCPneumatic - Normal CloseS002/FNHigh Pressure 1/4"(F)71.6
BLStandard Low PressureS003High Pressure & High Flow 1/2"(F) 120.9
BFForged Body⑧ Handle & Label Color76-S23

High Pressure 1/4", 76: Overall Length, S23: Bracket Square Size

NoneBlueL76.2

Low Pressure 1/4"(F)76.2 / Low Pressure 1/2"(M)76.2

 Diaphragm ValveRRed54Low Pressure 1/4"(WB)54
 Bellows ValveGGreen69Low Pressure 1/2",3/8" (WB)69
BBlack
③ Connection TypeVSilver⑭ Option-4(Seat material)
UUnilok Tube FittingWWhiteNonePCTFE(-10~80°C)
CUHP UCR FittingPI / VPI / VESPEL(-10~150°C)
WBButt Weld⑨ Bleed OptionPFA / FPFA(-10~150°C)
FLFlangedNoneNo Bleed
3Constant Bleed Ø0.3⑮ Option-5(Panel Nut)
④ Flow Path Pattern6Constant Bleed Ø0.6NoneNot assembled Panel Nut
For DBL and DBH seriesPNAssembled panel Nut
⑩ Material
⑤ Connectin SizeDM316LSS - SEMI F20
041/4"SL316LSS
063/8"
081/2"
123/4"
161"



Specification

Size1/4"1/2"
Orifice Size4.36.5
Cv Value0.30.7
Max. Working Pressure10bar
Max. Working Temperature-10~80℃ (14~176℉)
Handle Operation Angle90°
Internal Leakage
Allowance - He
≤1x10-9 atm.cc/s
External Leakage
Allowance - He
≤1x10-9 atm.cc/s

Features

A compactly designed body with minimal dead space. 

Body materials comply with SEMI F-20, “Specification for 316LSS Materials for UHP (Ultra High Purity) Grade Semiconductor Manufacturing Applications” 

Maximum flow capacity

Minimal particle generation

Minimal contributions of moisture, oxygen and hydrocarbon with UNILOK’s own special cleaning process in a certified clean room

Excellent finish level of wetted areas with UNILOK’s own electro polish process

Elgiloy® diaphragm material with strong durability as well as corrosion resistance for long cycle life

PCTFE seat material with remarkable chemical and thermal resistance

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