- Product Name : GF Series – UHP Gas Filter
- Product Category : UHP, Filter&Regulator, GF UHP Gas Filter
To meet the requirements of SEMI E49.8-96, the UNILOK GF Series
gas fiter is optimized for gas filtering applications.
UNILOK GF Series is made up ot 316L VAR stainless steel housing and
sintered construction filter that will be best sloution for UHP application.
· Sintered Construction 316L SS filter.
· Fully welded and compact designed body.
· High particle removal efficiency.
· High differential pressure rating.
· All Stainless steel housing.
· 100% Helium leak tested.
|Removal Rating||→ 99.9999999% at 0.003 ㎛|
|Rated Flow||15 SLPM|
|Max. Working Pressure||206 bar [3000 psig]|
|Max. Operating Temperature||Ambient to 400℃|
Allowance - He
|≤ 1x10^-9 atm.cc/s|
|Body||316L SS Single
|316L SS Double
|Filter Element||316L SS|
|Average||< 0.125 ㎛|
Every GF series filters are inboard helium leak tested to a rate
of 1×10-9cm 3/sec at seat and all seals.
All components are precisely cleaned with 18㏁ deionized water
after the passivation procedure in accordance with our own UHP
cleaning process (UNIP-705-38)
Reference specification : SEMI E49.6.
Each component is double bagged to ensure component cleanliness and
to protect them from environmental contamination.
Referenced specification : SEMI E49.1.
Proper installation, materials compatibility, operation and maintenance
of these valves are the responsibility of the user.
The total system design must be taken into consideration to ensure
optimal performance and safety. Overall process of testing, cleaning,
assembling and packaging for every GF series filters are performed in a
certified clean room.
|Fractional[Inch] Tube O.D. Designation|
|Rated Flow [SLPM]|
|U||UNILOK Tube Fitting|
|UCR [Metal Face Seal] Size Designator|
|DM||316L SS-Double Melting|
|SM||316L SS-Single Melting|