Compact designed body with minimal dead space Body materials comply with
SEMI F-20, “Specification 316LSS Materials for UHP (Ultra High Purity)
Grade Semiconductor Manufacturing Applications” Maximum flow capacity
Minimal particle generation Minimal contributions of moisture, oxygen and
hydrocarbon with UNILOK’s own special cleaning process in a certified clean
room Excellent finish level of wetted areas with UNILOK’s own electro polish
process Elgiloy® diaphragm material with strong durability as well as
corrosion resistance for long cycle life PCTFE seat material with remarkable
chemical and thermal resistance
According to ASTM F1394-92
According to SEMA-90120397B-STD
All components are precisely cleaned with 18㏁ deionized water after
the passivation procedure in accordance with our own UHP cleaning
Reference specification : SEMI E49.6.
Every VCD series valves are inboard helium leak tested to a
rate of 1×10-9 cm3/sec at seat and all seals.
According to SEMI E49.6
Each component is double bagged to ensure component cleanliness and
to protect them from environmental contamination.
Referenced specification : SEMI E49.1.
Proper installation, materials compatibility, operation and maintenance of
these valves are the responsibility of the user. The total system design
must be taken into consideration to ensure optimal performance and safety.
Overall process of testing, cleaning, assembling and packaging for every
VCD series valves are performed in a certified clean room.
UNILOK VCD series valves are ordered by part number as shown as below.
Example: The following part number, VCDLC-04M-PO-SL-EP
is designated for Low Pressure Diaphragm Valve, both 1/4” Male UCR,
Pneumatic Normal Open Operation, 316LSS, EP.
UCR- Metal Face Seal.
Flow Path Pattern Designator
See the details in page 309.