· Function of the pressure of the purge gas which flows through
· Low space requirement.
· Extremely fast evacuation time.
· All performed in class 100 and class 10 clean rooms.
· Stainless Steel 316L construction.
|Orifice Size||1.35 mm|
|Ultimate Vacuum||50torr [66.7mbar]|
|Gas Flow at Ultimate||60 l/min|
|Gas Pressure at Ultimate||80 psig|
|Optimize working Pressure||80~100 psig|
|Max. Working Pressure||150 psig [10kgf/cm²]|
Every VCG series are inboard helium leak tested to a rate
of 1×10-9 cm3/sec
According to ASTM F1394-92.
According to SEMA-90120397B-STD.
All components are precisely cleaned with 18㏁ deionized water
after the passivation procedure in accordance with our own UHP
Reference specification : SEMI E49.6.
Each component is double bagged to ensure component cleanliness
and to protect them from environmental contamination.
Referenced specification : SEMI E49.1.
|Inlet Connection Size|
|Fractional[Inch] Tube O.D. Designation|
|DM||316LSS - Double Melting|
|SM||316LSS - Single Melting|
|WB-||Tube Butt Weld|
|UCR Size Designator|
|Surface Finish Level|
|BA||BA - Bright Annealing|